Photoacoustic sensors and mems devices

ABSTRACT

A photoacoustic sensor includes a first MEMS device and a second MEMS device. The first MEMS device includes a first MEMS component including an optical emitter, and a first optically transparent cover wafer-bonded to the first MEMS component, wherein the first MEMS component and the first optically transparent cover form a first closed cavity. The second MEMS device includes a second MEMS component including a pressure detector, and a second optically transparent cover wafer-bonded to the second MEMS component, wherein the second MEMS component and the second optically transparent cover form a second closed cavity.

RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.17/116,029, filed Dec. 9, 2020, which claims priority to GermanyApplication No. 102019134279.1, filed Dec. 13, 2019, which areincorporated herein by reference in their entirety.

FIELD

The present disclosure relates to photoacoustic sensors and MEMSdevices.

BACKGROUND

Photoacoustic sensors can detect specific gas species in the ambientair, for example. In particular, harmful or hazardous components in theambient air can be detected in this case. The correct functioning ofsuch sensors can thus be of extremely high importance in manyapplications, particularly if the sensors are intended to guarantee thesafety of work personnel. Photoacoustic sensors can be constructed froma plurality of components, in particular MEMS devices. Manufacturers ofphotoacoustic sensors and MEMS devices constantly endeavor to improvetheir products. In particular, it may be desirable in this case toprovide cost-effective photoacoustic sensors having an improved design.Furthermore, it may be desirable to provide improved methods forproducing such apparatuses.

SUMMARY

Various aspects relate to a photoacoustic sensor. The photoacousticsensor includes a first MEMS device and a second MEMS device. The firstMEMS device includes a first MEMS component including an opticalemitter, and a first optically transparent cover wafer-bonded to thefirst MEMS component, wherein the first MEMS component and the firstoptically transparent cover form a first closed cavity. The second MEMSdevice includes a second MEMS component including a pressure detector,and a second optically transparent cover wafer-bonded to the second MEMScomponent, wherein the second MEMS component and the second opticallytransparent cover form a second closed cavity.

Various aspects relate to a MEMS device. The MEMS device includes a MEMScomponent and a cover secured to the MEMS component, wherein the MEMScomponent and the cover form a closed cavity. The MEMS devicefurthermore includes an optical opening, which provides an opticalaccess to the cavity and to an optical path extending within the cavity.A movable part of the MEMS component is arranged outside the course ofthe optical path.

BRIEF DESCRIPTION OF THE DRAWINGS

Photoacoustic sensors and MEMS devices in accordance with the disclosureare explained in greater detail below with reference to drawings. Theelements shown in the drawings are not necessarily rendered in a mannertrue to scale relative to one another. Identical reference signs maydesignate identical components.

FIG. 1 schematically illustrates a cross-sectional side view of a MEMSdevice 100 in accordance with the disclosure.

FIG. 2 schematically illustrates a cross-sectional side view of a MEMSdevice 200 in accordance with the disclosure.

FIG. 3 schematically illustrates a cross-sectional side view of apackaged MEMS device 300 in accordance with the disclosure.

FIG. 4 schematically illustrates a cross-sectional side view of apackaged MEMS device 400 in accordance with the disclosure.

FIG. 5 schematically illustrates a cross-sectional side view of apackaged MEMS device 500 in accordance with the disclosure.

FIG. 6 schematically illustrates a cross-sectional side view of apackaged MEMS device 600 in accordance with the disclosure.

FIG. 7 schematically illustrates a cross-sectional side view of apackaged MEMS device 700 in accordance with the disclosure.

FIG. 8 schematically illustrates a cross-sectional side view of apackaged MEMS device 800 in accordance with the disclosure.

FIG. 9 schematically illustrates a cross-sectional side view of apackaged MEMS device 900 in accordance with the disclosure.

FIG. 10 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1000 in accordance with the disclosure.

FIG. 11 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1100 in accordance with the disclosure.

FIG. 12 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1200 in accordance with the disclosure.

FIG. 13 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1300 in accordance with the disclosure.

FIG. 14 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1400 in accordance with the disclosure.

FIG. 15 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1500 in accordance with the disclosure.

FIG. 16 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1600 in accordance with the disclosure.

FIG. 17 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1700 in accordance with the disclosure.

FIG. 18 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1800 in accordance with the disclosure.

FIG. 19 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 1900 in accordance with the disclosure.

FIG. 20 schematically illustrates a cross-sectional side view of aphotoacoustic sensor 2000 in accordance with the disclosure.

FIG. 21 schematically illustrates a perspective cross-sectional view ofa MEMS device 2100 in accordance with the disclosure.

FIG. 22 schematically illustrates a perspective cross-sectional view ofa photoacoustic sensor 2200 in accordance with the disclosure.

FIG. 23 schematically illustrates a perspective cross-sectional view ofa photoacoustic sensor 2300 in accordance with the disclosure.

DETAILED DESCRIPTION

The figures described below show photoacoustic sensors and MEMS devicesin accordance with the disclosure. In this case, the describedapparatuses may be illustrated in a general way in order to describeaspects of the disclosure qualitatively. The apparatuses described mayhave further aspects that may not be illustrated in the respectivefigure for the sake of simplicity. However, the respective example maybe extended by aspects described in association with other examples inaccordance with the disclosure. Consequently, explanations concerning aspecific figure may equally apply to examples of other figures.

FIGS. 1 and 2 show unpackaged MEMS devices 100 and 200. The MEMS devices100 and 200 described can each form a photoacoustic emitter unit or aphotoacoustic detector unit. A photoacoustic sensor, for example, canthus be constructed from the MEMS devices 100 and 200.

The MEMS device 100 in FIG. 1 can comprise a MEMS component 2 having oneor more movable structures (MEMS structures 4). The MEMS component 2 canbe a MEMS chip, which can be fabricated from a semiconductor materialsuch as silicon, for example. In one example, the MEMS component 2 cancomprise a pressure detector. The pressure detectors specified in thisdescription can be, for example, microphones or any other type ofpressure sensors or pressure-sensitive sensors. In this case, the MEMSdevice 100 can form for example a photoacoustic detector unit of aphotoacoustic sensor. In a further example, the MEMS component 2 cancomprise an emitter of optical radiation, wherein the movable structure4 can form a heating membrane, for example. In this case, the MEMSdevice 100 can form for example a photoacoustic emitter unit of aphotoacoustic sensor.

The MEMS device 100 can comprise an optically transparent cover 6, whichcan be secured to the top side of the MEMS component 2. In this case,the MEMS component 2 and the optically transparent cover 6 can bewafer-bonded, in particular, that is to say that a connection of the twocomponents may have been carried out at the wafer level. The opticallytransparent cover 6 can be fabricated for example from a glass material,a semiconductor material, or a ceramic material. The MEMS component 2and the optically transparent cover 6 can form a first closed cavity 8.Depending on the application of the MEMS device 100, a protective gas ora reference gas can be enclosed in the cavity 8. The protective gasesspecified in this description can be for example nitrogen or a noblegas, such as e.g. argon, xenon, krypton. The reference gases specifiedin this description can be for example carbon dioxide, nitrogen oxide,methane, ammonia.

The MEMS device 100 can comprise a cover 10, which can be secured to theunderside of the MEMS component 2. In this case, the MEMS component 2and the cover 10 can be wafer-bonded, in particular, that is to say thata connection of the two components may have been carried out at thewafer level. The cover 10 can be optically transparent. By way ofexample, the cover 10 can be fabricated from a glass material, asemiconductor material, or a ceramic material. The MEMS component 2 andthe cover 10 can form a further closed cavity 12. Depending on theapplication of the MEMS device 100, a protective gas or a reference gascan be enclosed in the cavity 12.

The MEMS component 2 can comprise an electrical connection 14, which canbe electrically contacted by way of an electrical connection element 16such as a bond wire, for example. The MEMS component 2 can beelectrically connected to external components (not illustrated) by wayof the electrical connection 14 and the electrical connection element16. If the MEMS device 100 forms a photoacoustic detector unit, forexample, signals detected by the movable structure 4 can be transmittedto an external component in this way. If the MEMS device 100 forms aphotoacoustic emitter unit, for example, the optical radiation emittedby the movable structure 4 can be controlled by an external component inthis way.

The covers 6 and 10 can each be wafer-bonded to the MEMS component 2.The connections between the respective components can thus be present inthe form of so-called wafer bonds 18. Different wafer bonding techniquescan be used here depending on the material of the respective cover 6 or10 and the MEMS component 2. One example can involve wafer bondingwithout the use of an intermediate layer. This can involve in particulardirect bonding or anodic bonding. A further example can involve waferbonding using an intermediate layer. This can involve in particularglass frit bonding, soldering, eutectic bonding, thermocompressionbonding, or adhesive bonding.

During the production of the MEMS device 100, the parts thereof can beconnected at the wafer level. That is to say at least one of thecomponents 2, 6 and 10 can initially be present in the form of a waferduring the production of the MEMS device 100. By way of example, thecover 6 can initially be part of a glass wafer that can comprise anydesired number of further covers. The wafers can be connected to oneanother using one of the wafer bonding techniques mentioned above. Thebonded wafers can subsequently be singulated into a plurality of MEMSdevices 100. Production of the MEMS device 100 at the wafer level usingthe wafer bonding techniques described above may be more cost-effectivein comparison with other production methods.

The MEMS device 200 in FIG. 2 can be at least partly similar to the MEMSdevice 100 in FIG. 1 . Explanations concerning FIG. 1 can thus also beapplicable to the MEMS device 200. The MEMS device 200 can comprise acarrier 20, on which the MEMS component 2 can be arranged. By way ofexample, the carrier 20 can be a semiconductor substrate, in particulara silicon substrate. The MEMS component 2 can be secured to the carrier20 for example by an adhesive or a DDAF (Dicing Die Attach Film). Acavity 12 can be formed between the underside of the movable structure 4and the top side of the carrier 20.

Furthermore, the MEMS device 200 can comprise an optically transparentcover 6, which can be secured to the top side of the carrier 20. In thiscase, the optically transparent cover 6 and the carrier 20 can bewafer-bonded, in particular, such that a connection between thesecomponents can be present in the form of a wafer bond 18. The opticallytransparent cover 6 and the carrier 20 can form a cavity 8, in which theMEMS component 2 can be arranged. In the example in FIG. 2 , the carrier20 can be embodied as substantially planar. In further examples, thecarrier 20, in particular that part of the carrier 20 which is arrangedbelow the cover 6, can have a depression. The depression can be formedin the shape of a trough, for example. The MEMS component 2 can bearranged in the depression, such that the movable part 4 can be at adeeper level and/or the height of the cavity 8 can be increased incomparison with FIG. 2 . The MEMS component 2 can be electricallyconnected, by way of an electrical connection element 22, to anelectrical connection 14 arranged on the carrier 20 and to a furtherelectrical connection element 16. Being electrically connected in thisway enables the MEMS component 2 to transmit or receive electricalsignals to or from external components.

FIGS. 3 to 9 show packaged MEMS devices 300 to 900. The MEMS devices 300to 900 described can each form a photoacoustic emitter unit or aphotoacoustic detector unit. A photoacoustic sensor, for example, canthus be constructed from the MEMS devices 300 to 900. FIGS. 3 to 9 showin particular possibilities for packaging the MEMS devices 100 and 200from FIGS. 1 and 2 . In this case, the examples shown in FIGS. 3 to 9are based on the MEMS device 100 from FIG. 1 . Further examples with thesame construction can be based on the MEMS device 200 from FIG. 2 .

The MEMS device 300 in FIG. 3 can comprise a package in the form of ashell or trough 24. In one example, the shell 24 can be fabricated froma mold compound. The mold compounds specified in this description cancomprise at least one from an epoxy, a filled epoxy, aglass-fiber-filled epoxy, an imide, a thermoplastic, a thermosettingpolymer, a polymer mixture. An unpackaged MEMS device 100 can bearranged on a base surface of the shell 24. The MEMS device 100 canoptionally additionally be embedded into an encapsulation material suchas, for example, a glob top material (not illustrated). The packagedMEMS device 300 can furthermore comprise one or more connectingconductors 26. The connecting conductors 26 can extend through the wallsof the shell 24 and provide an electrical connection between the MEMScomponent 2 and components (not illustrated) arranged outside the shell24.

The packaged MEMS device 400 in FIG. 4 can comprise a carrier 28, whichcan be for example a die pad of a leadframe. An unpackaged MEMS device100 can be arranged on the carrier 28. An opening 30 can be formed inthe carrier 28, through which opening the MEMS device 100 can emitand/or receive optical radiation. The MEMS device 100 can be at leastpartly encapsulated in an encapsulation material 32, which can befabricated from a mold compound, in particular. Within the encapsulationmaterial 32, the unpackaged MEMS device 100 can be optionallyadditionally embedded in a further encapsulation material 34 such as,for example, a glob top material.

The packaged MEMS device 400 can comprise one or more connectingconductors 26, which can project at least partly from the encapsulationmaterial 32. The connecting conductors 26 can be for example leads orpins of a leadframe. The MEMS component 2 can be electrically contactedfrom outside the encapsulation material 32 by way of the connectingconductors 26. An electrical connection between the MEMS component 2 andthe connecting conductors 26 is not illustrated in FIG. 4 for the sakeof simplicity.

The packaged MEMS device 500 in FIG. 5 can comprise a carrier 28 andelectrical connections 36, which can be arranged in an identical plane.In this case, in particular the top sides and undersides of the carrier28 and of the connections 36 can be arranged in each case in a coplanarfashion. The carrier 28 and the electrical connections 36 can be forexample parts of an identical leadframe. A MEMS device 100 can bearranged on the carrier 28, which MEMS device can be at least partlyencapsulated in an encapsulation material 32. The encapsulation material32 can be fabricated from a mold compound, in particular. In the examplein FIG. 5 , the encapsulation material 32 can cover the side surfaces ofthe MEMS device 100. The top side of the MEMS device 100 can remain freeof the encapsulation material 32, such that optical radiation can beemitted and/or received by the MEMS device 100. The encapsulationmaterial 32 can cover the carrier 28 and the electrical connections 36and can also be arranged in the interspaces of these components. Anunderside of the encapsulation material 32 and undersides of the carrier28 and of the electrical connections 36 can be arranged in one plane,i.e. can be embodied in a coplanar fashion.

The packaged MEMS device 600 in FIG. 6 can be at least partly similar tothe MEMS device 500 in FIG. 5 . In contrast to FIG. 5 , the MEMS device600 in FIG. 6 can comprise a further encapsulation material 34, whichcan be at least partly covered by the encapsulation material 32. Thefurther encapsulation material can be a glob top material, for example.The MEMS device 100 can be embedded in the further encapsulationmaterial 34, wherein a top side of the MEMS device 100 can remain freeof the further encapsulation material 34 in order to enable opticalradiation to be exchanged between the MEMS device 100 and thesurroundings.

The packaged MEMS device 700 in FIG. 7 can comprise a substrate 38. Thesubstrate 38 can have one or more electrical connections 40A to 40C onits top side and underside. The electrical connections 40A to 40C can beelectrically connected to one another by way of a wiring structure 42arranged within the substrate 38. As a result, electrical signals can beredistributed between electrical connections on an identical side of thesubstrate 38 or on opposite sides of the substrate 38. The MEMScomponent 2 can be electrically connected to the electrical connection40A on the top side of the substrate 38 by way of an electricalconnection element 16. The electrical connection 40A can be electricallyconnected to the electrical connection 40B on the underside of thesubstrate 38 by way of the wiring structure 42. The MEMS component 100can thus be contacted from outside the packaged MEMS device 700 by wayof the electrical connection 40B. The MEMS component 100 can be at leastpartly encapsulated in an encapsulation material 32, which can befabricated from a mold compound, for example. In this case, inparticular the top side of the MEMS device 100 can remain free of theencapsulation material 32.

The packaged MEMS device 800 in FIG. 8 can be at least partly similar tothe MEMS device 700 in FIG. 7 . In contrast to FIG. 7 , the MEMS device800 in FIG. 8 can comprise a further encapsulation material 34, whichcan be covered by the encapsulation material 32. The furtherencapsulation material 34 can be a glob top material, for example. Thetop side of the MEMS device 100 can remain free of both encapsulationmaterials 32 and 34.

In a manner similar to FIG. 3 , the MEMS device 900 in FIG. 9 cancomprise a package in the form of a shell 24, a MEMS device 100 arrangedtherein and connecting conductors 26 extending through the shell 24. Anopening on the top side of the shell 24 can be covered by a cover 44having an optically reflected inner surface 46. The shell 24 and thecover 44 can form a closed cavity. An optically reflective structure 48can be arranged on the left sidewall of the shell 24, which structurecan be realized for example by an optically reflective coating or anoptically reflective lamina. An optically transparent window 50 can beformed in the right sidewall of the shell 24.

In one example, the MEMS device 900 can be operated as a photoacousticemitter unit. Optical radiation generated by the movable structure 4 canbe reflected from the inner surface 46 of the cover 44 and/or thestructure 48 in such a way that the optical radiation can emerge fromthe interior of the MEMS device 900 through the window 50. In a furtherexample, the MEMS device 900 can be operated as a photoacoustic detectorunit. Optical radiation emitted by an emitter, for example, can enterthe interior of the MEMS device 900 through the window 50. The opticalradiation can be reflected from the inner surface 46 of the cover 44and/or the structure 48 in such a way that the optical radiation canenter the cavity 8 of the MEMS device 100. Detailed paths of the opticalradiation are not illustrated in FIG. 9 for the sake of simplicity.

FIGS. 10 to 20 show photoacoustic sensors 1000 to 2000, each of whichcan comprise a photoacoustic emitter unit and a photoacoustic detectorunit. The emitter unit and detector unit can be realized here in eachcase by one of the MEMS devices described in association with previousfigures.

The photoacoustic sensor 1000 in FIG. 10 can comprise a substrate 52having an opening 54. The substrate 52 can be for example a printedcircuit board substrate or a ceramic substrate. The substrate 52 canhave one or more electrical connections 56A and 56B on its top side andunderside. A wiring structure (not illustrated) can be formed within thesubstrate 52, and can electrically connect the electrical connections56A and 56B of the substrate 52 to one another in a suitable manner.

An (unpackaged) first MEMS device 100A can be arranged on the top sideof the substrate 52 and over the opening 54. The first MEMS device 100Acan be a photoacoustic emitter unit, which can comprise an emitter 58 inthe form of a MEMS component. The cavities of the first MEMS device 100Acan be filled by a protective gas 62. The first MEMS device 100A can beelectrically connected to a first electrical connection 56A of thesubstrate 52 by way of a first electrical connection element 16A.

An (unpackaged) second MEMS device 100B can be arranged on the undersideof the substrate 52 and over the opening 54. The second MEMS device 100Bcan be a photoacoustic detector unit, which can comprise a pressuredetector 60 in the form of a MEMS component. The cavities of the secondMEMS device 100B can be filled by a reference gas 64. The second MEMSdevice 100B can be electrically connected to a second electricalconnection 56B of the substrate 52 by way of a second electricalconnection element 16B.

The first MEMS device 100A or the emitter 58 can be a broadband emitter,which can be designed to emit optical radiation over a wide frequencyrange. In other words, the radiation emitted by the broadband emittercan comprise not just predetermined frequencies or predeterminedfrequency bands. The term “optical radiation” used in this descriptioncan generally refer to a partial range of the electromagnetic spectrumhaving wavelengths of between approximately 100 nm and approximately 100μm. That is to say that the optical radiation can comprise, inparticular, at least one from the following: ultraviolet (UV) radiationhaving a wavelength of approximately 100 nm to approximately 380 nm,infrared (IR) radiation having a wavelength of approximately 780 nm toapproximately 100 μm, or radiation having a wavelength of approximately780 nm to approximately 5 μm, i.e. near-infrared radiation and portionsof mid-infrared radiation. The last-mentioned range can comprise, interalia, the absorption lines/bands of carbon dioxide at 4.26 μm and offurther gas species. Even more specifically, the optical radiation canhave a wavelength of approximately 300 nm to approximately 20 μm(micrometers).

The first MEMS device 100A can be designed to emit optical pulses havinga predetermined repetition frequency and one or more predeterminedwavelengths. In this case, a predetermined wavelength can comprise anabsorption band of a gas to be detected or of the reference gas 64. Therepetition frequency of the optical pulses can be within a low-frequencyrange or within a frequency range of approximately 1 Hz to approximately10 kHz, in particular of approximately 1 Hz to approximately 1 kHz. Evenmore specifically, a typical frequency range can be betweenapproximately 1 Hz and approximately 100 Hz, corresponding to a pulseduration range of approximately 0.01 s to approximately 1 s.

A manner of functioning of the photoacoustic sensor 1000 is describedbelow. The further photoacoustic sensors described herein can beoperated in a similar manner.

The optical pulses emitted by the first MEMS device 100A can passthrough the interspace formed by the opening 54, which interspace can befilled with ambient air, for example. During propagation through theopening 54, the optical pulses can be at least partly absorbed byportions of a gas to be detected if such a gas is present in the opening54 (i.e. in the ambient air). The absorption can be specific to the gasto be detected, e.g. characteristic rotation or vibration modes of atomsor molecules of the gas to be detected.

The optical pulses can enter the cavity of the MEMS device 100B throughthe optically transparent material of the second MEMS device 100B andimpinge there on atoms or molecules of the reference gas 64. In thiscase, the reference gas 64 can correspond to the gas to be detected. Theoptical pulses can at least partly be absorbed by the reference gas 64and bring about local pressure increases in the reference gas 64. Thepressure increases can be detected by the pressure detector 60 or amovable structure of the pressure detector 60. The signals detected bythe pressure detector 60 can be logically processed by one or morecircuits (not illustrated). By way of example, such signal processingcan be carried out by an ASIC (Application Specific Integrated Circuit).

If no portions of the gas to be detected are present in the opening 54or in the ambient air, the optical pulses emitted by the first MEMSdevice 100A are only absorbed by the reference gas 64 and the pressuredetector 60 will detect a periodic measurement signal with therepetition frequency of the optical pulses and a first amplitude. If, incontrast thereto, portions of the gas to be detected are present in theopening 54, the optical radiation can additionally be absorbed by theseportions. The pressure detector 60 will then output a periodicmeasurement signal with a second amplitude, which may be smaller thanthe first amplitude. A presence and/or a concentration of the gas to bedetected in the ambient air can be determined on the basis of themagnitudes and profiles of the first and second amplitudes. If theconcentration of the gas to be detected exceeds a predeterminedthreshold value, a signal, in particular a warning signal, can be outputby the photoacoustic sensor 1000 or an apparatus connected thereto.

The photoacoustic sensor 1100 in FIG. 11 can be at least partly similarto the photoacoustic sensor 1000 in FIG. 10 . In contrast to FIG. 10 ,the photoacoustic emitter unit and the photoacoustic detector unit canbe present in the form of packaged MEMS devices 400A and 400B, each ofwhich can be similar to the MEMS device 400 in FIG. 4 .

The photoacoustic sensor 1200 in FIG. 12 can comprise a substrate 52,which can be similar to the substrate 52 in FIG. 10 , for example.Electrical connections and an internal wiring of the substrate 52 arenot illustrated in FIG. 12 for the sake of simplicity. A first MEMSdevice 100A and a second MEMS device 100B can be arranged next to oneanother on the top side of the substrate 52. The MEMS devices 100A and100B can each be similar to the MEMS device 100 in FIG. 1 and form aphotoacoustic emitter unit and a photoacoustic detector unit. A cover 66having an optically reflective inner surface 68 can be arranged over theMEMS devices 100A and 100B. In this case, the cover 66 can be secured tothe substrate 52. Optical radiation emitted by the first MEMS device100A can be reflected once or several times from the inner surface 68 ofthe cover 66 and can enter the cavity of the second MEMS device 100B.

The photoacoustic sensor 1300 in FIG. 13 can comprise two MEMS devices300A and 300B, each of which can be similar to the MEMS device 300 inFIG. 3 . The MEMS devices 300A and 300B can be arranged next to oneanother on a substrate 52 in such a way that the openings of the shells24A and 24B can face one another. As a result, optical radiation emittedby the first MEMS device 300A can pass through an interspace 54 with agas to be detected possibly being present and can enter the cavity ofthe second MEMS device 300B. The MEMS devices 100A and 100B arranged inthe shells 24A and 24B may or may not be encapsulated by anencapsulation material (not illustrated) such as a glob top material,for example.

The photoacoustic sensor 1400 in FIG. 14 can comprise a leadframe 70having a die pad 72 and one or more connecting conductors (or leads orpins) 74A and 74B. A carrier 76 can be arranged on the top side of thedie pad 72, which carrier can be at least partly hollow. A first MEMSdevice 100A, which can have the functionality of a photoacoustic emitterunit, can be arranged on the top side of the die pad 72 or on the topside of the carrier 76. A second MEMS device 100B, which can have thefunctionality of a photoacoustic detector unit, can be arranged on theunderside of the die pad 72. The leadframe 70, the carrier 76 and theMEMS devices 100A, 100B can be at least partly encapsulated by anencapsulation material 32, which can be fabricated from a mold compound,for example. The connecting conductors 74A and 74B can at least partlyproject from the encapsulation material 32 and make the MEMS devices100A and 100B electrically accessible from outside the package by way ofelectrical connection elements 16A and 16B.

The photoacoustic sensor 1400 can comprise a gas channel 78, which canextend through the encapsulation material 32 and the carrier 76. In theexample in FIG. 14 , the gas channel 78 can have substantially threesections 78A to 78C. The first section 78A can extend in the y-directionsubstantially from the top side of the encapsulation material 32 as faras the top side of the carrier 76. The second section 78B can extend inthe x-direction substantially parallel to the die pad 72 through thecarrier 76 and can extend between the MEMS devices 100A and 100B. Thethird section 78C can extend in the y-direction substantially from theunderside of the carrier 76 to the underside of the encapsulationmaterial 32. The sections 78A to 78C of the gas channel 78 can mergecontinuously into one another. In the example in FIG. 14 , thetransitions between the sections 78A to 78C can have a rounded shape. Infurther examples, the transitions can have a different shape, forexample angular, polygonal, etc. Ambient air can penetrate into theinterior of the encapsulation material 32 through the gas channel 78. Anexemplary path that can be taken by the ambient air through theencapsulation material 14 is indicated by arrows in FIG. 14 .

The carrier 76 can have an opening on its top side, such that theunderside of the first MEMS device 100A can be exposed. In a similarmanner, the underside of the carrier 76 and the die pad 72 can haveopenings, such that the top side of the second MEMS device 100B can beexposed. The openings of the carrier 76 and of the die pad 72 and thesecond section 78B of the gas channel 78 can form an interspace 54between the MEMS devices 100A and 100B. Optical radiation emitted by thefirst MEMS device 100A can propagate along an optical path in they-direction through the interspace 54 to the second MEMS device 100B. Ina similar manner, ambient air can pass through the gas channel 78 intothe interspace 54 and thus into the optical path. In accordance with theprinciples of a photoacoustic sensor described above, the ambient aircan be examined for possibly present portions of a gas to be detected.

The photoacoustic sensor 1500 in FIG. 15 can comprise a leadframe 70having a die pad 72 and connecting conductors 74A and 74B. Two MEMSdevices 100A and 100B can be arranged on the die pad 72, which MEMSdevices can form a photoacoustic emitter unit and a photoacousticdetector unit. The leadframe 70 and the MEMS devices 100A and 100B canbe embedded in an encapsulation material 32. The die pad 72 can haveopenings 80A and 80B on its underside. In this case, the first opening80A can be arranged below the first MEMS device 100A in such a way thatthe underside of the first MEMS device 100A can be exposed. In a similarmanner, the second opening 80B can be arranged below the second MEMSdevice 100B in such a way that the underside of the second MEMS device100B can be exposed.

During operation of the photoacoustic sensor 1500, the first MEMS device100A can emit optical radiation through the first opening 80A. Theoptical radiation emitted can pass through ambient air, for example,which can be situated below the photoacoustic sensor 1500, for example.The optical radiation can be reflected at optically reflectivestructures (not illustrated) in such a way that it can enter the secondMEMS device 100B through the second opening 80B.

The photoacoustic sensor 1600 in FIG. 16 can be at least partly similarto the photoacoustic sensor 1500 in FIG. 15 . In the example in FIG. 15, a carrier 76 can be arranged over the die pad 72. Through the carrier76, an optical channel 82 can extend from the underside of the firstMEMS device 100A as far as the underside of the second MEMS device 100B.Radiation emitted by the first MEMS device 100A can propagate throughthe optical channel 82 to the second MEMS device 100B. In one example,the optical channel 82 can be formed by a hollow channel havingoptically reflective inner surfaces. The die pad 72 and the carrier 76can have openings, such that ambient air to be examined can pass into aninterspace 54 or into the course of the optical channel 82.

The photoacoustic sensor 1700 in FIG. 17 can comprise a shell 24, on thebase surface of which a photoacoustic emitter unit and a photoacousticdetector unit in the form of two MEMS devices 100A and 100B can bearranged. The MEMS devices 100A and 100B can be electrically contactedfrom outside the shell 24 by way of connecting conductors 26A and 26B.During operation of the photoacoustic sensor 1700, the first MEMS device100A can emit optical radiation, for example in the y-direction. Theoptical radiation emitted can pass through ambient air, for example,which can be situated above the photoacoustic sensor 1700, for example.The optical radiation can be reflected at optically reflectivestructures (not illustrated) such that it can enter the second MEMSdevice 100B.

The photoacoustic sensor 1800 in FIG. 18 can be at least partly similarto the photoacoustic sensor 1700 in FIG. 17 . In the example in FIG. 18, a separating structure 84 can be arranged between the MEMS devices100A and 100B. Furthermore, a cover 66 having an optically reflectiveinner surface 68 can be arranged over the MEMS devices 100A and 100B.

The photoacoustic sensor 1900 in FIG. 19 can be at least partly similarto the photoacoustic sensor 1700 in FIG. 17 . In contrast to FIG. 17 ,the MEMS devices 100A and 100B can each be rotated by 90 degrees and bearranged on the base surface of the shell 24. During operation of thephotoacoustic sensor 1900, the radiation emitted by the photoacousticemitter can pass substantially in the x-direction, for example.

In the example in FIG. 20 , the MEMS devices 100A and 100B can bearranged in a manner stacked one above the other on the base surface ofthe shell 24. One or more spacers 86 can be arranged between the MEMSdevices 100A and 100B, as a result of which an interspace 54 arrangedbetween the MEMS devices 100A and 100B can be formed. During operationof the photoacoustic sensor 2000, ambient air situated in the interspace54, for example, can be examined for portions of a gas to be detected.In this case, optical pulses emitted by the first MEMS device 100A canpass through the interspace 54 in the y-direction.

The MEMS device 2100 in FIG. 21 can comprise a MEMS component 88 and acover 90 secured to the MEMS component 88. In this case, the MEMScomponent 88 and the cover 90 can form a closed cavity 92. The MEMScomponent 88 can have an optical opening 94, which provides an opticalaccess to the cavity 92 and to an optical path extending within thecavity 92. A movable part or a movable structure 96 of the MEMScomponent 88 can be arranged outside the course of the optical path.

The MEMS component 88 can be a MEMS chip, for example, which can befabricated from a semiconductor material such as silicon, for example.The movable part 96 of the MEMS component 88 can be formed from asemiconductor material of the MEMS component 88. In the example in FIG.21 , the movable part 96 can form a membrane of a pressure detector. Inthis case, the MEMS device 2100 can form for example a photoacousticdetector unit of a photoacoustic sensor. Below the movable part 96, afirst depression 98 can be arranged in a semiconductor material of theMEMS component 88. An (in particular acoustically tight) cavity can beformed by the first depression 98A.

The optical opening 94 can be arranged in particular in the underside ofthe MEMS component 88. In the example in FIG. 21 , the optical opening94 can be formed by or comprise a barrier layer 102. The barrier layer102 can be fabricated from a semiconductor material of the MEMScomponent 88, for example. The optical opening 94 or the barrier layer102 can be transparent to optical radiation, on the one hand. On theother hand, the optical opening 94 or the barrier layer 102 can beimpermeable to a gas arranged in the cavity 92, in particular areference gas.

Below the optical opening 94, a second depression 98B can be arranged ina semiconductor material of the MEMS component 88. The depressions 98Aand 98B may have been produced by identical method steps and have asubstantially identical geometric shape. In one example, the firstdepression 98A can be fabricated by an etching method in a semiconductormaterial of the MEMS component 88. In further process steps, the movablepart 96 of the MEMS component 88 can be structured further in order toform a membrane of a pressure detector, for example. The seconddepression 98B can be fabricated in parallel with the etching stepdescribed. In this case, the further process steps for forming themovable part 96 can be dispensed with, such that only the thin barrierlayer 102 comprised of a semiconductor material can remain. The barrierlayer 102 or the optical opening 94 can thus be regarded as anincompletely produced pressure detector or “half pressure detector”. Onaccount of the parallel production described, the optical opening 94 orthe barrier layer 102 and the movable part 96 of the MEMS component 88can lie substantially in an identical plane. In this case, the plane canin particular correspond to the top side of the MEMS component 88 orextend parallel thereto.

The cover 90 can be secured to the top side of the MEMS component 88,such that the MEMS component 88 and the cover 90 can form the closedcavity 92. In this case, the cover 90 may have been secured to the MEMScomponent 88 by means of a wafer bonding technique, in particular. Thecover 90 can be fabricated from a glass material or a semiconductormaterial, for example. The inner surface of the cover 90 can beoptically reflective or have optically reflective structures.

In one example, the MEMS device 2100 can be operated in particular as aphotoacoustic detector unit. During operation, radiation emitted by anoptical emitter (not illustrated) can enter the cavity 92 through theoptical opening 94 or the barrier layer 102. The optical radiation maypreviously have passed through ambient air, for example, which isintended to be examined for portions of a gas to be detected. Theoptical radiation can be at least partly absorbed by a reference gasenclosed in the cavity 92. In this case, the optical radiation can bereflected at the inner surface of the cover 90 in such a way that it canpass at least partly parallel to the top side of the MEMS component 88after reflection within the cavity 92. On account of such a parallelcourse, a lengthened absorption path can be provided in comparison withconventional photoacoustic detector units. The optical radiation can beat least partly absorbed by the reference gas and bring about localpressure increases in the reference gas. The pressure increases in thereference gas can be detected by the movable part 96. The detectedsignals can be logically processed for example by an ASIC (notillustrated).

In contrast to conventional photoacoustic detector units, in the examplein FIG. 21 the movable part 96 can be arranged such that it lies outsidea course of the optical radiation, i.e. outside the optical path.Consequently, since the optical radiation does not impinge on a surfaceof the movable part 96, corruption of the signals detected by themovable part 96 can be avoided or at least reduced.

FIGS. 22 and 23 show photoacoustic sensors 2200 and 2300, each of whichcan comprise a photoacoustic emitter unit and a photoacoustic detectorunit. The emitter unit and detector unit can be realized in each case bya MEMS device which can be similar to the MEMS device 2100 in FIG. 21 .In further examples, the MEMS devices 2100 can also be combined to forma photoacoustic sensor in accordance with any of FIGS. 10 to 20 .

The photoacoustic sensor 2200 in FIG. 22 can be at least partly similarto the photoacoustic sensor 2000 in FIG. 20 and be operated in a similarmanner. Two MEMS devices 2100A and 2100B stacked one above the other canbe arranged on the base surface of a shell 24, which MEMS devices can bespaced apart from one another by one or more spacers 86. The lower MEMSdevice 2100A can have the function of a photoacoustic emitter unit. Inthis case, a movable part 96 of the MEMS device 2100A can form a heatingmemory, for example, which can be designed to emit optical radiation.The upper MEMS device 2100B can have the function of a photoacousticdetector unit and can be similar to the MEMS device 2100 in FIG. 21 .

The photoacoustic sensor 2300 in FIG. 23 can comprise a housing 104,which can be embodied in a U-shaped fashion, for example. In the examplein FIG. 23 , the housing 104 can have two substantially verticalsections 106A and 106B, which can be connected by a substantiallyhorizontal section 106C. The vertical housing sections 106A and 106B canhave cavities 108A and 108B. A first MEMS device 2100A, which can beembodied as a photoacoustic emitter unit, can be arranged in the firstcavity 108A. A second MEMS device 2100B, which can be embodied as aphotoacoustic detector unit, can be arranged in the second cavity 108B.

The vertical housing sections 106A and 106B can have openings 110A and110B, which can be arranged at an identical height and can face oneanother. The MEMS devices 2100A and 2100B can be arranged in ananalogous manner such that their main surfaces can face one another.During operation of the photoacoustic sensor 2300, optical radiationemitted by the first MEMS device 2100A can pass through the opening 110Aand an interspace 54 situated between the vertical housing sections 106Aand 106B. In the interspace 54, the optical radiation can be absorbed bya gas to be detected possibly being present there and can enter thesecond MEMS device 2100B through the second opening 10B.

EXAMPLES

Photoacoustic sensors and MEMS devices are explained below on the basisof examples.

Example 1 is a photoacoustic sensor, comprising:

a first MEMS device, comprising: a first MEMS component comprising anoptical emitter, and a first optically transparent cover wafer-bonded tothe first MEMS component, wherein the first MEMS component and the firstoptically transparent cover form a first closed cavity; and a secondMEMS device, comprising: a second MEMS component comprising a pressuredetector, and a second optically transparent cover wafer-bonded to thesecond MEMS component, wherein the second MEMS component and the secondoptically transparent cover form a second closed cavity

Example 2 is a photoacoustic sensor according to example 1, wherein thefirst MEMS device further comprises: a third cover wafer-bonded to thefirst MEMS component, wherein the first MEMS component and the thirdcover form a third closed cavity, wherein the first cavity and the thirdcavity are arranged on opposite sides of a movable structure of thefirst MEMS component.

Example 3 is a photoacoustic sensor according to example 1, wherein thefirst MEMS device further comprises: a carrier, wherein the first coveris wafer-bonded to the carrier,

wherein the first cavity is arranged between the first cover and amovable structure of the first MEMS component, and wherein a thirdcavity is arranged between the carrier and the movable structure.

Example 4 is a photoacoustic sensor according to any of the precedingexamples, furthermore comprising: a substrate, wherein the first MEMSdevice and the second MEMS device are arranged next to one another on asame surface of the substrate.

Example 5 is a photoacoustic sensor according to example 4, furthermorecomprising: a cover arranged above the MEMS devices arranged next to oneanother, said cover having an optically reflective inner surface.

Example 6 is a photoacoustic sensor according to any of examples 1 to 3,furthermore comprising: a substrate, wherein the first MEMS device andthe second MEMS device are arranged on opposite surfaces of thesubstrate and over an opening formed in the substrate.

Example 7 is a photoacoustic sensor according to any of examples 1 to 3,furthermore comprising: an encapsulation material, wherein the firstMEMS device and the second MEMS device are encapsulated by theencapsulation material.

Example 8 is a photoacoustic sensor according to example 7, furthermorecomprising: a gas channel extending within the encapsulation materialbetween the first MEMS device and the second MEMS device.

Example 9 is a photoacoustic sensor according to example 7 or 8,furthermore comprising: an optical path extending within theencapsulation material from the first MEMS device to the second MEMSdevice.

Example 10 is a photoacoustic sensor according to example 9, furthermorecomprising: a leadframe, wherein the first MEMS device and the secondMEMS device are arranged on opposite surfaces of the leadframe, whereinthe gas channel extends at least partly parallel to the surfaces of theleadframe, and wherein the optical path extends at least partlyperpendicularly to the surfaces of the leadframe.

Example 11 is a photoacoustic sensor according to example 9, furthermorecomprising: leadframe, wherein the first MEMS device and the second MEMSdevice are arranged on a same surface of the leadframe, wherein theoptical path extends at least partly parallel to the surface of theleadframe.

Example 12 is a photoacoustic sensor according to any of examples 1 to3, furthermore comprising: a shell, wherein the first MEMS device andthe second MEMS device are arranged next to one another on a base of theshell.

Example 13 is a photoacoustic sensor according to any of examples 1 to3, furthermore comprising: a shell, wherein the first MEMS device andthe second MEMS device are arranged in a manner stacked one above theother on a base of the shell and a spacer is arranged between the MEMSdevices stacked one above the other.

Example 14 is a MEMS device, comprising: a MEMS component; a coversecured to the MEMS component, wherein the MEMS component and the coverform a closed cavity; and an optical opening, which provides an opticalaccess to the cavity and to an optical path extending within the cavity,wherein a movable part of the MEMS component is arranged outside thecourse of the optical path.

Example 15 is a MEMS device according to example 14, wherein the opticalopening and the movable part of the MEMS component lie substantially ina same plane.

Example 16 is a MEMS device according to example 14 or 15, wherein theoptical opening comprises a barrier layer formed by a semiconductormaterial of the MEMS component.

Example 17 is a MEMS device according to any of examples 14 to 16,wherein the optical opening is impermeable to a gas arranged in thecavity.

Example 18 is a MEMS device according to any of examples 14 to 17,wherein the cover is produced from a glass material and is secured to asemiconductor material of the MEMS component.

Example 19 is a MEMS device according to example 18, wherein the glassmaterial of the cover is wafer-bonded to the semiconductor material ofthe MEMS component.

Example 20 is a MEMS device according to any of examples 14 to 19,wherein: the cover is arranged over a first surface of the MEMScomponent, and the optical opening is formed in a second surface of theMEMS component situated opposite the first surface.

Example 21 is a MEMS device according to example 20, wherein the opticalpath extends within the cavity at least partly parallel to the firstsurface of the MEMS component.

Example 22 is a MEMS device according to any of examples 14 to 21,furthermore comprising: a first depression formed in a semiconductormaterial of the MEMS component, said first depression being arrangedbelow the movable part of the MEMS component; a second depression formedin a semiconductor material of the MEMS component, said seconddepression being arranged below the optical opening, wherein the firstdepression and the second depression have a substantially identicalgeometric shape.

Example 23 is a MEMS device according to any of examples 14 to 22,wherein the MEMS component comprises a pressure detector.

Although specific embodiments have been illustrated and describedherein, it is obvious to the person of average skill in the art that amultiplicity of alternative and/or equivalent implementations canreplace the specific embodiments shown and described, without departingfrom the scope of the present disclosure. This application is intendedto cover all adaptations or variations of the specific embodimentsdiscussed herein. Therefore, the intention is for this disclosure to berestricted only by the claims and the equivalents thereof.

What is claimed is:
 1. A MEMS device, comprising: a MEMS component; acover secured to the MEMS component, wherein the MEMS component and thecover form a closed cavity; and an optical opening that provides anoptical access to the cavity and to an optical path extending within thecavity, wherein a movable part of the MEMS component is arranged outsidea course of the optical path.
 2. The MEMS device as claimed in claim 1,wherein the optical opening and the movable part of the MEMS componentlie substantially in an identical plane.
 3. The MEMS device as claimedin claim 1, wherein the optical opening comprises a barrier layer formedby a semiconductor material of the MEMS component.
 4. The MEMS device asclaimed in claim 1, wherein the optical opening is impermeable to a gasarranged in the cavity.
 5. The MEMS device as claimed in claim 1,wherein the cover is produced from a glass material and is secured to asemiconductor material of the MEMS component.
 6. The MEMS device asclaimed in claim 5, wherein the glass material of the cover iswafer-bonded to the semiconductor material of the MEMS component.
 7. TheMEMS device as claimed in claim 1, wherein the cover is arranged over afirst surface of the MEMS component, and wherein the optical opening isformed in a second surface of the MEMS component situated opposite tothe first surface.
 8. The MEMS device as claimed in claim 7, wherein theoptical path extends within the cavity at least partly parallel to thefirst surface of the MEMS component.
 9. The MEMS device as claimed inclaim 1, further comprising: a first depression formed in asemiconductor material of the MEMS component, the first depression beingarranged below the movable part of the MEMS component; and a seconddepression formed in the semiconductor material of the MEMS component,the second depression being arranged below the optical opening, whereinthe first depression and the second depression have a substantiallyidentical geometric shape.
 10. The MEMS device as claimed in claim 1,wherein the MEMS component comprises a pressure detector.
 11. The MEMSdevice as claimed in claim 1, wherein the cover is a transparent cover.12. The MEMS device as claimed in claim 1, wherein the cover iswafer-bonded to the MEMS component.
 13. The MEMS device as claimed inclaim 1, wherein the cover is a first cover, wherein the closed cavityis a first closed cavity, and wherein the MEMS device further comprises:a second cover that forms a second closed cavity with the MEMScomponent.
 14. The MEMS device as claimed in claim 13, wherein thesecond cover is optically transparent.
 15. The MEMS device as claimed inclaim 1, further comprising: an electrical connection that connects theMEMS device to external components.
 16. The MEMS device as claimed inclaim 1, further comprising: an electrical connection that connects theMEMS device to external components, wherein the electrical connection isconfigured to enable an external component to control optical radiationemitted by the movable part.
 17. The MEMS device as claimed in claim 1,wherein the movable part is configured to transmit a signal detected bythe movable part to an external component.
 18. The MEMS device asclaimed in claim 1, further comprising: a carrier that is configured forthe MEMS component to be arranged on.
 19. A device, comprising: a MEMScomponent; a cover, wherein the MEMS component and the cover form acavity; and an opening that provides an access to the cavity and to apath within the cavity, wherein a part of the MEMS component is arrangedoutside the path.
 20. The device of claim 19, wherein the MEMS componentcomprises a pressure detector.